KQET-5011L 0.1um Online Particle Counter
Online Particle Counter
Online laser particle counter for continuous cleanroom monitoring and system integration.
Overview
Online laser particle counter for continuous cleanroom monitoring and system integration.
Technical Specifications
Particle Size Range0.1um~5.0um
Standard Channels0.1um 0.15um 0.2um 0.25um 0.3um 0.5um 1.0um 5.0um
0.1 μm Counting Efficiency50±20%
Concentration Indication Error0.5um≤±20%FS
Max Concentration35,000 counts/L with over-concentration protection and purge prompt
Repeatability Error±5%FS
Purge Time≤5min
Flow Rate2.83 L/min ±5%, real-time monitoring, over-limit alarm