KQET-5128A-100 Online Particle Counter
Online Particle Counter
Online laser particle counter for continuous cleanroom monitoring and system integration.
Overview
Online laser particle counter for continuous cleanroom monitoring and system integration.
Technical Specifications
Particle Size Range5μm~100μm
Channels5，10，20，30，50，100μm
Counting Efficiency50%±10% @5μm；100%±10%＞7.5μm
Max Concentration17,000 counts/L with over-concentration protection and purge prompt
Repeatability Error±5%FS
Purge Time≤5min
Flow Rate100 L/min ±5%, real-time monitoring, over-limit alarm
Laser SourceImported semiconductor laser diode (10-year lifetime)